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Comparison of methods for the determination of ultra trace amounts of arsenic in high purity trichlorosilane by neutron activation analysis and atomic absorption spectroscopy



Comparison of methods for the determination of ultra trace amounts of arsenic in high purity trichlorosilane by neutron activation analysis and atomic absorption spectroscopy



Journal of Radioanalytical & Nuclear Chemistry 91(1): 107-114



Neutron activation analysis has been applied to the determination of ultra-trace amounts of arsenic based on the substoichiometric extraction of As(III) with thionalide. The arsenic content in high-purity trichlorosilane or silicon can be determined by the proposed method down to sub-ppb range with a very good reproducibility. Also, the data obtained were compared with results from atomic absorption spectrophotometry.

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