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High-performance hybrid complementary logic inverter through monolithic integration of a MEMS switch and an oxide TFT

High-performance hybrid complementary logic inverter through monolithic integration of a MEMS switch and an oxide TFT

Small 11(12): 1390-1395

A hybrid complementary logic inverter consisting of a microelectromechanical system switch as a promising alternative for the p-type oxide thin film transistor (TFT) and an n-type oxide TFT is presented for ultralow power integrated circuits. These heterogeneous microdevices are monolithically integrated. The resulting logic device shows a distinctive voltage transfer characteristic curve, very low static leakage, zero-short circuit current, and exceedingly high voltage gain.

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Accession: 053547510

Download citation: RISBibTeXText

PMID: 25418881

DOI: 10.1002/smll.201402841

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