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Profile measuring method based on reflection characteristics at a critical angle in a right-angle prism



Profile measuring method based on reflection characteristics at a critical angle in a right-angle prism



Applied Optics 30(22): 3205-3209



A new method is proposed for profile measurements using a right-angle prism. With this method, the distance to an object surface is measured by using triangulation based on a change of the critical angle of total reflection. An object surface is illuminated by a scanning laser beam and the incident angle of the scattered light into the prism is measured using the change in the critical angle. Three-dimensional profiles of objects with rough surfaces can be measured with high accuracy.

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Accession: 055205095

Download citation: RISBibTeXText

PMID: 20706376

DOI: 10.1364/AO.30.003205



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