+ Site Statistics
+ Search Articles
+ PDF Full Text Service
How our service works
Request PDF Full Text
+ Follow Us
Follow on Facebook
Follow on Twitter
Follow on LinkedIn
+ Subscribe to Site Feeds
Most Shared
PDF Full Text
+ Translate
+ Recently Requested

The applications of in situ electron energy loss spectroscopy to the study of electron beam nanofabrication

The applications of in situ electron energy loss spectroscopy to the study of electron beam nanofabrication

Microscopy and Microanalysis 15(3): 204-212

An in situ electron energy loss spectroscopy (EELS) technique has been developed to investigate the dynamic processes associated with electron-beam nanofabrication on thin membranes. In this article, practical applications germane to e-beam nanofabrication are illustrated with a case study of the drilling of nanometer-sized pores in silicon nitride membranes. This technique involves successive acquisitions of the plasmon-loss and the core-level ionization-loss spectra in real time, both of which provide the information regarding the hole-drilling kinetics, including two respective rates for total mass loss, individual nitrogen and silicon element depletion, and the change of the atomic bonding environment. In addition, the in situ EELS also provides an alternative method for endpoint detection with a potentially higher time resolution than by imaging. On the basis of the time evolution of in situ EELS spectra, a qualitative working model combining knock-on sputtering, irradiation-induced mass transport, and phase separation can be proposed.

Please choose payment method:

(PDF emailed within 0-6 h: $19.90)

Accession: 056240437

Download citation: RISBibTeXText

PMID: 19460176

DOI: 10.1017/s1431927609090345

Related references

Direct Observation of Redox Switching in Resistive Memory Devices Operated In-situ in a Transmission Electron Microscope by Electron Energy Loss Spectroscopy and Off-Axis Electron Holography. Microscopy and Microanalysis 22(S5): 52-53, 2016

Assessing electron beam sensitivity for SrTiO3 and La0.7Sr0.3MnO3 using electron energy loss spectroscopy. Ultramicroscopy 169: 98-106, 2016

Electron Energy-Loss Spectroscopy Study of the Change in the Free-Electron Density in Thin Superconducting NbN Films under Ion-Beam Irradiation. Crystallography Reports 63(2): 241-244, 2018

Intermixing at Au-In and Pd-In interfaces at 90 K as observed by in situ Auger-electron and electron-energy-loss spectroscopy. Physical Review. B, Condensed Matter 49(3): 1996-2000, 1994

Electron Energy Loss Spectroscopy for Aqueous in Situ Scanning Transmission Electron Microscopy. Microscopy and Microanalysis 17(S2): 778-779, 2011

In situ analysis of gas composition by electron energy-loss spectroscopy for environmental transmission electron microscopy. Ultramicroscopy 111(3): 177-185, 2011

New applications of electron spectroscopic imaging esi electron energy loss spectroscopy eels and electron spectroscopic diffraction esd including computer assisted image processing. European Journal of Cell Biology Suppl. (18): 14, 1987

Direct Detection Electron Energy-loss Spectroscopy: Applications in Low-dose Chemical Mapping and In Situ Heating+biasing. Microscopy and Microanalysis 24(S1): 452-453, 2018

Electron energy loss spectroscopy microanalysis and imaging in the transmission electron microscope: example of biological applications. Journal of Electron Spectroscopy and Related Phenomena 143(2-3): 189-203, 2005

In situ high resolution electron microscopy/electron energy loss spectroscopy observation of wetting of a Si surface by molten Al. Journal of Microscopy 203(Pt 1): 17-21, 2001

The structural transitions of C60 nanowhiskers under an electric field characterized by in situ transmission electron microscopy and electron energy-loss spectroscopy. Nanoscale 6(12): 6585-6589, 2014

In Situ Environmental Cell-Transmission Electron Microscopy Study of Microbial Reduction of Chromium(VI) Using Electron Energy Loss Spectroscopy. Microscopy and Microanalysis 7(6): 470-485, 2003

In situ ageing of fine beech roots (Fagus sylvatica) assessed by transmission electron microscopy and electron energy loss spectroscopy: Description of microsites and evolution of polyphenolic substances. Biology of the Cell 94(2): 55-63, 2002

Demonstration of lanthanum in liver cells by energy-dispersive X-ray spectroscopy, electron energy loss spectroscopy and high-resolution transmission electron microscopy. Journal of Microscopy 223(Pt 2): 133-139, 2006

Two-dimensional boundary conditions and finite-size effects in angle-resolved photoelectron emission spectroscopy, low-energy electron diffraction, and high-resolution electron-energy-loss spectroscopy. Physical Review. B, Condensed Matter 37(6): 2884-2891, 1988