+ Site Statistics
+ Search Articles
+ PDF Full Text Service
How our service works
Request PDF Full Text
+ Follow Us
Follow on Facebook
Follow on Twitter
Follow on LinkedIn
+ Subscribe to Site Feeds
Most Shared
PDF Full Text
+ Translate
+ Recently Requested

A low-voltage lateral MEMS switch with high RF performance



A low-voltage lateral MEMS switch with high RF performance



Journal of Microelectromechanical Systems 13(6): 902-911




Please choose payment method:






(PDF emailed within 0-6 h: $19.90)

Accession: 063235225

Download citation: RISBibTeXText

DOI: 10.1109/jmems.2004.838395


Related references

High-Performance Lateral-Actuating Magnetic MEMS Switch. Journal of Microelectromechanical Systems 20(4): 842-851, 2011

An RF-MEMS Switch With Low-Actuation Voltage and High Reliability. Journal of Microelectromechanical Systems 15(6): 1605-1611, 2006

Design and simulation of a novel RF MEMS shunt capacitive switch with low actuation voltage and high isolation. Microsystem Technologies 23(6): 1907-1912, 2017

Novel High-Capacitance-Ratio MEMS Switch: Design, Analysis and Performance Verification. Micromachines 9(8), 2018

Compact low-loss high-performance single-pole six-throw RF MEMS switch design and modeling for DC to 6 GHz. Microsystem Technologies 21(11): 2387-2396, 2015

High-performance hybrid complementary logic inverter through monolithic integration of a MEMS switch and an oxide TFT. Small 11(12): 1390-1395, 2014

A low voltage vertical comb RF MEMS switch. Microsystem Technologies 16(6): 919-924, 2010

Design and modeling of a novel RF MEMS series switch with low actuation voltage. Microsystem Technologies 22(12): 2921-2929, 2016

Design, optimization and simulation of a low-voltage shunt capacitive RF-MEMS switch. Microsystem Technologies 22(3): 537-549, 2016

Investigation of actuation voltage for non-uniform serpentine flexure design of RF-MEMS switch. Microsystem Technologies 20(3): 413-418, 2014

Novel high capacitance ratio compact float metal based RF MEMS switch for multi band and variable bandwidth: design and RF performance analysis. Microsystem Technologies 22(12): 2977-2986, 2016

Low-actuation voltage RF MEMS shunt switch with cold switching lifetime of seven billion cycles. Journal of Microelectromechanical Systems 12(5): 713-719, 2003

A lateral RF MEMS capacitive switch utilizing parylene as dielectric. Microsystem Technologies 18(1): 77-85, 2012

A Highly Reliable Lateral MEMS Switch Utilizing Undoped Polysilicon as Isolation Material. Journal of Microelectromechanical Systems 16(5): 1173-1184, 2007

Lateral Contact Three-State RF MEMS Switch for Ground Wireless Communication by Actuating Rhombic Structures. Journal of Microelectromechanical Systems 22(1): 10-12, 2013