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A micromachined gas sensor based on a catalytic thick film/SnO2 thin film bilayer and thin film heater: Part 1: CH4 sensing



A micromachined gas sensor based on a catalytic thick film/SnO2 thin film bilayer and thin film heater: Part 1: CH4 sensing



Sensors and Actuators B: Chemical 109(2): 185-189




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Accession: 063335847

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DOI: 10.1016/j.snb.2005.05.013


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