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Design and nonlinear servo control of MEMS mirrors and their performance in a large port-count optical switch



Design and nonlinear servo control of MEMS mirrors and their performance in a large port-count optical switch



Journal of Microelectromechanical Systems 14(2): 261-273




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Accession: 063354646

Download citation: RISBibTeXText

DOI: 10.1109/JMEMS.2004.839827


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