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Design and nonlinear servo control of MEMS mirrors and their performance in a large port-count optical switch

Design and nonlinear servo control of MEMS mirrors and their performance in a large port-count optical switch

Journal of Microelectromechanical Systems 14(2): 261-273

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Accession: 063354646

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DOI: 10.1109/JMEMS.2004.839827

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