High-Efficiency MEMS Electrochemical Actuators and Electrochemical Impedance Spectroscopy Characterization
Sheybani, R; Meng, E
Journal of Microelectromechanical Systems 21(5): 1197-1208
2012
ISSN/ISBN: 1057-7157 DOI: 10.1109/jmems.2012.2203103
Accession: 064202191
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