Effect of sputtering power on friction coefficient and surface energy of co-sputtered titanium and molybdenum disulfide coatings and its performance in micro hot-embossing
Saha, B.D.M.H.D.E.T.S.B.L.E.C.J.H.
Microsystem Technologies 20(6): 1069-1078
2014
ISSN/ISBN: 0946-7076 DOI: 10.1007/s00542-013-1783-2
Accession: 064473384
Si micromolds are common for fabrication of polymer-based microfluidic devices by hot-embossing because of the well established fabrication methods for Si, e. g., deep reactive ion etching, for favorable surface finish and accuracy. The problems with low yield, poor reproducibility, premature failure and limited lifetime of a Si micromold are induced by high friction and surface adhesion generated during demolding.