+ Site Statistics
+ Search Articles
+ PDF Full Text Service
How our service works
Request PDF Full Text
+ Follow Us
Follow on Facebook
Follow on Twitter
Follow on LinkedIn
+ Subscribe to Site Feeds
Most Shared
PDF Full Text
+ Translate
+ Recently Requested

Reaction Mechanism for Atomic Layer Deposition of Germanium Ditelluride Thin Films



Reaction Mechanism for Atomic Layer Deposition of Germanium Ditelluride Thin Films



Journal of Nanoscience and Nanotechnology 17(5): 3472-3476




Please choose payment method:






(PDF emailed within 0-6 h: $19.90)

Accession: 065040926

Download citation: RISBibTeXText

DOI: 10.1166/jnn.2017.14044


Related references

Reaction Mechanism Underlying Atomic Layer Deposition of Antimony Telluride Thin Films. Journal of Nanoscience and Nanotechnology 16(5): 4924-4928, 2016

Reaction Mechanisms of the Atomic Layer Deposition of Tin Oxide Thin Films Using Tributyltin Ethoxide and Ozone. Langmuir 33(24): 5998-6004, 2017

Interfacial catalysis in and initial reaction mechanism of Al 2 O 3 films fabricated by atomic layer deposition using non-hydrolytic sol-gel chemistry. Physical Chemistry Chemical Physics 18(45): 31223-31229, 2016

Nanoporous SiO2 thin films made by atomic layer deposition and atomic etching. Nanotechnology 27(25): 255603, 2016

Atomic layer deposition of sodium and potassium oxides: evaluation of precursors and deposition of thin films. Dalton Transactions 43(44): 16666-16672, 2014

Low-temperature atomic layer deposition of copper metal thin films: self-limiting surface reaction of copper dimethylamino-2-propoxide with diethylzinc. Angewandte Chemie 48(25): 4536-4539, 2009

Deposition of thin films of organic-inorganic hybrid materials based on aromatic carboxylic acids by atomic layer deposition. Dalton Transactions 39(48): 11628-11635, 2010

Interface Electrical Properties of Al 2 O 3 Thin Films on Graphene Obtained by Atomic Layer Deposition with an in Situ Seedlike Layer. Acs Applied Materials and Interfaces 9(8): 7761-7771, 2017

Rubidium containing thin films by atomic layer deposition. Dalton Transactions 46(46): 16139-16144, 2017

Perovskite thin films via atomic layer deposition. Advanced Materials 27(1): 53-58, 2015

Atomic layer deposition and characterization of Bi₂Te₃ thin films. Journal of Physical Chemistry. a 119(11): 2298-2306, 2015

Growth of La1-xSrxFeO3 thin films by atomic layer deposition. Dalton Transactions 2009(3): 481-489, 2009

Atomic layer deposition of tungsten(III) oxide thin films from W2(NMe2)6 and water: precursor-based control of oxidation state in the thin film material. Journal of the American Chemical Society 128(30): 9638-9639, 2006

Preferential growth of ZnO thin films by the atomic layer deposition technique. Nanotechnology 19(43): 435609, 2008

Spatial atomic layer deposition of zinc oxide thin films. Acs Applied Materials and Interfaces 4(1): 268-272, 2012