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Novel High-Capacitance-Ratio MEMS Switch: Design, Analysis and Performance Verification



Novel High-Capacitance-Ratio MEMS Switch: Design, Analysis and Performance Verification



Micromachines 9(8)



This paper proposes a novel high-capacitance-ratio radio frequency micro-electromechanical systems (RF MEMS) switch. The proposed RF MEMS mainly consists of serpentine flexure MEMS metallic beam, comprised of coplanar waveguide (CPW) transmission line, dielectric and metal-insulator-metal (MIM) floating metallic membrane. Comparing the proposed high-capacitance-ratio MEMS switch with the ones in available literature, an acceptable insertion loss insulation, acceptable response time and high capacitance ratio (383.8) are achieved.

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Accession: 065861630

Download citation: RISBibTeXText

PMID: 30424323

DOI: 10.3390/mi9080390


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