+ Site Statistics
References:
54,258,434
Abstracts:
29,560,870
PMIDs:
28,072,757
+ Search Articles
+ PDF Full Text Service
How our service works
Request PDF Full Text
+ Follow Us
Follow on Facebook
Follow on Twitter
Follow on LinkedIn
+ Subscribe to Site Feeds
Most Shared
PDF Full Text
+ Translate
+ Recently Requested

Novel Test Fixture for Characterizing MEMS Switch Microcontact Reliability and Performance



Novel Test Fixture for Characterizing MEMS Switch Microcontact Reliability and Performance



Sensors 19(3)



In microelectromechanical systems (MEMS) switches, the microcontact is crucial in determining reliability and performance. In the past, actual MEMS devices and atomic force microscopes (AFM)/scanning probe microscopes (SPM)/nanoindentation-based test fixtures have been used to collect relevant microcontact data. In this work, we designed a unique microcontact support structure for improved post-mortem analysis. The effects of contact closure timing on various switching conditions (e.g., cold-switching and hot-switching) was investigated with respect to the test signal. Mechanical contact closing time was found to be approximately 1 us for the contact force ranging from 10⁻900 μN. On the other hand, for the 1 V and 10 mA circuit condition, electrical contact closing time was about 0.2 ms. The test fixture will be used to characterize contact resistance and force performance and reliability associated with wide range of contact materials and geometries that will facilitate reliable, robust microswitch designs for future direct current (DC) and radio frequency (RF) applications.

Please choose payment method:






(PDF emailed within 0-6 h: $19.90)

Accession: 066446205

Download citation: RISBibTeXText

PMID: 30704077

DOI: 10.3390/s19030579


Related references

Packaging-Test-Fixture for In-Line Coupling RF MEMS Power Sensors. Journal of Microelectromechanical Systems 20(6): 1231-1233, 2011

An RF-MEMS Switch With Low-Actuation Voltage and High Reliability. Journal of Microelectromechanical Systems 15(6): 1605-1611, 2006

Cryogenic Performance of RF MEMS Switch Contacts. Journal of Microelectromechanical Systems 17(6): 1460-1467, 2008

Row/Column Addressing Scheme for Large Electrostatic Actuator MEMS Switch Arrays and Optimization of the Operational Reliability by Statistical Analysis. Journal of Microelectromechanical Systems 17(5): 1104-1113, 2008

A low-voltage lateral MEMS switch with high RF performance. Journal of Microelectromechanical Systems 13(6): 902-911, 2004

High-Performance Lateral-Actuating Magnetic MEMS Switch. Journal of Microelectromechanical Systems 20(4): 842-851, 2011

Performance analysis of RF MEMS capacitive switch with non uniform meandering technique. Microsystem Technologies 22(11): 2633-2640, 2016

Performance improvement of RF-MEMS capacitive switch via asymmetric structure design. Microsystem Technologies 21(7): 1447-1452, 2015

Lateral MEMS microcontact considerations. Journal of Microelectromechanical Systems 8(3): 264-271, 1999

The simulation and visual test contact process of a MEMS inertial switch with flexible electrodes. Microsystem Technologies 22(8): 2035-2042, 2016

Novel High-Capacitance-Ratio MEMS Switch: Design, Analysis and Performance Verification. Micromachines 9(8), 2018

Electrical contact performance of MEMS acceleration switch fabricated by UV-LIGA technology. Microsystem Technologies 21(10): 2271-2278, 2015

High-performance hybrid complementary logic inverter through monolithic integration of a MEMS switch and an oxide TFT. Small 11(12): 1390-1395, 2014

Compact low-loss high-performance single-pole six-throw RF MEMS switch design and modeling for DC to 6 GHz. Microsystem Technologies 21(11): 2387-2396, 2015

Design and nonlinear servo control of MEMS mirrors and their performance in a large port-count optical switch. Journal of Microelectromechanical Systems 14(2): 261-273, 2005