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Spectroscopic and Langmuir probe measurements of Ar-N2 mixture plasma in magnetic pole enhanced Icp source

Spectroscopic and Langmuir probe measurements of Ar-N2 mixture plasma in magnetic pole enhanced Icp source

Optik - International Journal for Light and Electron Optics

DOI: 10.1016/j.ijleo.2016.11.013

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Accession: 066972213

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