A process simulation model for silicon ion implantation in undoped, LEC-grown GaAs
Bindal, A.; Wang, K.L.; Chang, S.J.; Kallel, M.A.; Chu, P.K.
Journal of the Electrochemical Society 136(8): 2414-2420
1989
ISSN/ISBN: 0013-4651 Accession: 073772710
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