Development of SMD 32.768 kHz tuning fork-type crystals using photolithography and selective etching process. Part I : Selective etching of an array of quartz tuning fork resonators

Sungkyu, L.E.E.; Kang, K.M.

Zeitschrift für Metallkunde 92(5): 501-503

2001


ISSN/ISBN: 0044-3093
Accession: 074836896

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