Fabrication of SMD 32.768 kHZ tuning fork-type crystals: Photolithography and selective etching of an array of quartz tuning fork resonators

Lee, S.; Lee, J.Y.; Park, T.S.

Materials and Corrosion (1995) 52(9): 712-715

2001


ISSN/ISBN: 0947-5117
Accession: 075424408

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