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Kinetics of carbon tetrachloride decomposition during the metalorganic vapor-phase epitaxy of gallium arsenide and indium arsenide

Begarney, M.J.; Warddrip, M.L.; Kappers, M.J.; Hicks, R.F.

Journal of Crystal Growth 193(3): 305-315

1998


ISSN/ISBN: 0022-0248
Accession: 076101320

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