Organic/inorganic thin films deposited from diethoxydimethylsilane by plasma enhanced chemical vapor deposition
Roualdes, S.; Hovnanian, N.; Van der Lee, A.; Berjoan, R.; Durand, J.
Journal of Non-Crystalline Solids 248(2-3): 235-246
1999
ISSN/ISBN: 0022-3093 Accession: 077062634
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