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Pore size distributions in low-κ dielectric thin films from X-ray porosimetry


Pore size distributions in low-κ dielectric thin films from X-ray porosimetry



Journal of Polymer Science. Part B. Polymer Physics 40(19): 2170-2177



ISSN/ISBN: 0887-6266


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(PDF emailed within 1 workday: $29.90)

Accession: 077278235

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