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Radio frequency magnetron sputtering of Au and low temperature plasma enhanced chemical vapor deposition of silicon nitride for ring ultramicroelectrodes fabrication

Mingzhi, Z.H.U.; Zhuangde, J.I.A.N.G.; Weixuan, J.I.N.G.; Biao, Y.A.N.G.

Journal of Electroanalytical Chemistry (1992) 596(2): 124-130

2006


ISSN/ISBN: 1572-6657
Accession: 077495540


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