RF harmonic suppression in Langmuir probe measurements in RF discharges
Flender, U.; Nguyen Thi, B.H.; Wiesemann, K.; Khromov, N.A.; Kolokolov, N.B.
Plasma Sources Science and Technology 5(1): 61-69
1996
ISSN/ISBN: 0963-0252
Accession: 077631700
PDF emailed within 1 workday: $29.90
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