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Role of hydrogen in Sb film deposition and characterization of Sb and GexSby films deposited by cyclic plasma enhanced chemical vapor deposition using metal-organic precursors

Hyung Keun, K.I.M.; Jin Hwan, J.U.N.G.; Doo Jin, C.H.O.I.

Thin Solid Films 520(23): 6947-6953

2012


ISSN/ISBN: 0040-6090
Accession: 077655486

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