TY  - JOUR
AN  - 076101320
AU  - Begarney,M.J.
AU  - Warddrip,M.L.
AU  - Kappers,M.J.
AU  - Hicks,R.F.
PY  - 1998
TI  - Kinetics of carbon tetrachloride decomposition during the metalorganic vapor-phase epitaxy of gallium arsenide and indium arsenide
JO  - Journal of Crystal Growth
VL  - 193
IS  - 3
SP  - 305
EP  - 315
SN  - 0022-0248
UR  - https://eurekamag.com/research/076/101/076101320.php
ER  -