Phase-resolved all-fiber reflection-based s-NSOM for on-chip characterization

Sun, Y.; Yan, X.; Blaize, S.; Bachelot, R.; Wei, H.; Ding, W.; Sun, Y; Yan, X; Blaize, S; Bachelot, R; Wei, H; Ding, W

Home

>

Section

>

Chapter

Phase-resolved all-fiber reflection-based s-NSOM for on-chip characterization

Sun, Y.; Yan, X.; Blaize, S.; Bachelot, R.; Wei, H.; Ding, W.

Optics Express 30(23): 41118-41132

2022

ISSN/ISBN: 1094-4087

PMID: 36366597

Accession: 080653001

Full-Text Article emailed within 1 workday

Payments are secure & encrypted

Summary

We report on a phase-resolved, reflection-based, scattering-type near-field scanning optical microscope technique with a convenient all-fiber configuration. Exploiting the flexible positioning of the near-field probe, our technique renders a heterodyne detection for phase measurement and point-to-point frequency-domain reflectometry for group index and loss measurement of waveguides on a chip. The important issue of mitigating the measurement errors due to environmental fluctuations along fiber-optic links has been addressed. We perform systematic measurements on different types of silicon waveguides which demonstrate the accuracy and precision of the technique. With a phase compensation approach on the basis of a common-path interferometer, the phase drift error is suppressed to ∼ 0.013°/s. In addition, characterizations of group index, group velocity dispersion, propagation loss, insertion loss, and return loss of component waveguides on a chip are all demonstrated. The measurement accuracy of the propagation loss of a ∼ 0.2 cm long nano-waveguide reaches ±1 dB/cm. Our convenient and versatile near-field characterization technique paves the way for in-detail study of complex photonic circuits on a chip.

Phase-resolved all-fiber reflection-based s-NSOM for on-chip characterization

Sun, Y.; Yan, X.; Blaize, S.; Bachelot, R.; Wei, H.; Ding, W.

Optics Express 30(23): 41118-41132

2022

Full-Text Article emailed within 1 workday

Summary

References