Designing and Simulation of a Multi-Direction Tiny Force Switch

Huang, T.; Yang, Z.Q.; Ding, G.F.; Zhao, X.L.

Advanced Materials Research 468-471: 895-898

2012


ISSN/ISBN: 1662-8985
DOI: 10.4028/www.scientific.net/amr.468-471.895
Accession: 082985201

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Summary
This paper describes the designing and producing of a multi-direction tiny force switch, which is based on the technology of micro-surface processing on privative silicon. The switch is mainly formed by shore, overhanging spring, movable electrode and fixed electrode. Its' structure material is Ni. The parameters of switch are confirmed by doing finite-element analysis with ANSYS. And rigidities of structure both on horizontal direction and vertical direction are analyzed by using ANSYS to ensure that the uniformity of switch rigidity is qualified. After producing the switch, the rigidity of switch is tested by using bonding tester. The test result shows that the rigidity is almost qualified with requirements.